Booth No. A035
Company Introduction
Nano Fine Tech Co., Ltd. was established in 2005 and specializes in the sales and supply of measurement machines for semiconductors and photo mask repair systems for displays.
Since 2020, we have expanded into the eco-friendly catalyst business, focusing on R&D, manufacturing, and OEM production of decomposition catalysts.
Our catalyst technology is a promising solution for eco-friendly and renewable energy applications. In particular, it offers excellent decomposition performance and durability, making it suitable for manufacturing processes across various industries, including semiconductors, displays, and chemicals.
Since 2020, we have expanded into the eco-friendly catalyst business, focusing on R&D, manufacturing, and OEM production of decomposition catalysts.
Our catalyst technology is a promising solution for eco-friendly and renewable energy applications. In particular, it offers excellent decomposition performance and durability, making it suitable for manufacturing processes across various industries, including semiconductors, displays, and chemicals.
Main Products & Services
Title : Perfluorinated Compounds (PFCs), Nitrous oxide (N₂O) Decomposition Catalyst and Al₂O₃ (Alumina support) Catalyst
Article
Emissions of PFCs and N₂O, including gases such as SF₆, CF₄, CHF₃, and C₄F₈, are increasing in semiconductor and display manufacturing processes. Although these gases account for a relatively small portion of total greenhouse gas emissions, they pose significant environmental concerns.
As global regulations on emissions become increasingly stringent, domestic companies are actively investing in and upgrading their facilities to reduce process gas emissions.
Article
Emissions of PFCs and N₂O, including gases such as SF₆, CF₄, CHF₃, and C₄F₈, are increasing in semiconductor and display manufacturing processes. Although these gases account for a relatively small portion of total greenhouse gas emissions, they pose significant environmental concerns.
As global regulations on emissions become increasingly stringent, domestic companies are actively investing in and upgrading their facilities to reduce process gas emissions.
